发明名称 Apparatus for synthesizing diamond
摘要 An apparatus for synthesizing diamond, which comprises a reaction chamber, a means for supplying to the reaction chamber a gas mixture comprising a hydrogen gas and an organic compound decomposable by a plasma to form a diamond or a gas mixture comprising a hydrogen gas, an inert gas and said organic compound, a means of conducting a microwave of frequency larger than 300 MHz to the reaction chamber to generate a microwave plasma in the gas mixture and a substrate held by a substrate holder to locate in the microwave plasma and on which diamond is to be formed, wherein the microwave conducting means is designed to introduce the microwave to the reaction chamber from a plurality of directions.
申请公布号 US4989542(A) 申请公布日期 1991.02.05
申请号 US19880197916 申请日期 1988.05.24
申请人 NATIONAL INSTITUTE FOR RESEARCH IN INORGANIC MATERIALS 发明人 KAMO, MUTSUKAZU
分类号 C30B29/04;C23C16/27;C23C16/458;C23C16/511;H01J37/32 主分类号 C30B29/04
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