| 摘要 |
<p>PURPOSE:To realize an efficient operation by a method wherein a detachable split sheet is provided at a connection part of a clean module. CONSTITUTION:An air flow 7 (clean degree: about Class 1000000) produced by using an air supply and evacuation apparatus is introduced into a main-body part 1 from an air-supply port 2; one part is cleaned to about Class 1 after dust particles have been filtered out by means of a high-performance filter 3, and is lowered to a workpiece 8 and a conveyance apparatus 6 from a ceiling part of the main-body part 1. This air flow discharges the dust particles (about Class 100000 to 1000000) produced at the workpiece 8 and the apparatus 6 to the outside from an evacuation port 4, and forms a clean space (Class 1) at the inside of a module. One part of the air introduced into the main-body part 1 is introduced into an adjacent module from an air-supply port 2, and forms a clean space (class 1) which has been connected to the inside of the module by the same operation. Thereby, a clean tunnel can be operated efficiently.</p> |
