PROCESS FOR VAPOR-PHASE SYNTHESIS OF DIAMOND

摘要

A process for chemical vapor-phase synthesis (CVD) of diamond with a wide variety of applications inexpensively at a high speed is disclosed. In one embodiment, a mixture of an oxygen gas, a carbon-containing compound gas, and optionally an inert gas is introduced into a reaction vessel, and a plasma is generated therein utilizing an electromagnetic field to thereby produce diamond on a base material placed in the vessel. In another embodiment, at least one of a fluorine gas, a chlorine gas, a nitrogen oxide gas and a sulfur dioxide gas, a mixture thereof with an oxygen gas and a carbon-containing compound gas, or a mixture thereof with an inert gas is introduced into a reaction vessel, and a plasma is generated therein utilizing an electromagnetic field to thereby produce diamond on a base material placed in the vessel.