发明名称 Coated substrates and process.
摘要 <p>Disclosed herein is a coated substrate and a process for forming films on substrates and for providing a particularly smooth film on a substrate. The method of this invention involves subjecting a surface of a substrate to contact with a stream of ions of an inert gas having sufficient force and energy to substantially change the surface characteristics of said substrate, and then exposing a film-forming material to a stream of ions of an inert gas having sufficient energy to vaporize the atoms of said film-forming material and to transmit the vaporized atoms to the substrate surface with sufficient force to form a film bonded to the substrate. This process is particularly useful commercially because it forms strong bonds at room temperature. This invention is particularly useful for adhering a gold film to diamond and forming ohmic electrodes on diamond, but also can be used to bond other films to substrates.</p>
申请公布号 EP0408265(A2) 申请公布日期 1991.01.16
申请号 EP19900307415 申请日期 1990.07.06
申请人 THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL 发明人 CHU, WEI-KAN;CHILDS, CHARLES B.
分类号 C01B31/06;B01J19/00;B01J19/08;C23C14/02;C23C14/06;C23C14/18;C23C14/20;C23C14/24;C23C14/46 主分类号 C01B31/06
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