发明名称 |
Coated substrates and process. |
摘要 |
<p>Disclosed herein is a coated substrate and a process for forming films on substrates and for providing a particularly smooth film on a substrate. The method of this invention involves subjecting a surface of a substrate to contact with a stream of ions of an inert gas having sufficient force and energy to substantially change the surface characteristics of said substrate, and then exposing a film-forming material to a stream of ions of an inert gas having sufficient energy to vaporize the atoms of said film-forming material and to transmit the vaporized atoms to the substrate surface with sufficient force to form a film bonded to the substrate. This process is particularly useful commercially because it forms strong bonds at room temperature. This invention is particularly useful for adhering a gold film to diamond and forming ohmic electrodes on diamond, but also can be used to bond other films to substrates.</p> |
申请公布号 |
EP0408265(A2) |
申请公布日期 |
1991.01.16 |
申请号 |
EP19900307415 |
申请日期 |
1990.07.06 |
申请人 |
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL |
发明人 |
CHU, WEI-KAN;CHILDS, CHARLES B. |
分类号 |
C01B31/06;B01J19/00;B01J19/08;C23C14/02;C23C14/06;C23C14/18;C23C14/20;C23C14/24;C23C14/46 |
主分类号 |
C01B31/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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