Semiconductor accelerometer - including weight support bracket of triangular or pentagonal cross=section

摘要

A semiconductor accelerometer has a frame formed by a silicon semiconductor substrate (101) in which are formed a weight (102), which is surrounded by and spaced (103) from the substrate, and a silicon support bracket (104), which connects the weight to the substrate. The novelty is that (i) a deformation measuring element (25) is formed in the surface region near the bracket attachment region; and (ii) the silicon support bracket (104) has either a triangular cross-section, defined by a (100) surface and two (111) surfaces, or a pentagonal cross-section, defined by a (100) surface, two (110) surfaces and two (111) surfaces. ADVANTAGE - The accelerometer has improved precision, sensitivity and strength and is simple to produce at low cost and with high productivity.