| 摘要 |
PURPOSE:To obtain the resin which is large in the change of a developing speed with respect to a change of an exposure and forms sharp patterns by incorporating a polyvalent phenol compd. obtd. by condensing a specific phenol compd. and specific hydroxy arom. aldehyde and a photosensitive agent into the above compsn. CONSTITUTION:The polyvalent phenol compd. obtd. by condensing the phenol compd. expressed by formula I and the hydroxy arom. aldehyde expressed by formula II and the photosensitive agent are incorporated into the compsn. In the formulas I and II, R<1> denotes 1 to 9C alkyl group or halogen atom; p denotes 0, 1 or 2; R<2> denotes a -OCH3 group, 1 to 9C alkyl group, halogen atom or nitro group, q is 0 or 1. The compd. is obtd. by bringing phenols for 1 to 8 hours at 50 to 180 deg.C at 0.8 to 50mol per 1mol aldehyde in the presence of an acidic catalyst. The change of the developing speed with respect to the change of the exposure is increased in this way and the sharp patterns are formed. |
