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发明名称
FOCAL POINT ADJUSTING METHOD FOR ELECTRON BEAM DEVICE
摘要
申请公布号
JPH02297854(A)
申请公布日期
1990.12.10
申请号
JP19890115132
申请日期
1989.05.10
申请人
FUJITSU LTD
发明人
OKUBO KAZUO;ITO AKIO;OZAKI KAZUYUKI;HAMA SOICHI;ABE TAKAYUKI
分类号
H01J37/21
主分类号
H01J37/21
代理机构
代理人
主权项
地址
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