APPARATUS FOR INSPECTING PATTERN,申请号JP19890100474-传众专利搜索

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发明名称	APPARATUS FOR INSPECTING PATTERN
摘要
申请公布号	JPH02278167(A)	申请公布日期	1990.11.14
申请号	JP19890100474	申请日期	1989.04.19
申请人	NEC CORP	发明人	TAGA HINAKO
分类号	G01R31/02;G01R31/28;H05K3/00	主分类号	G01R31/02
代理机构		代理人
主权项
地址

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