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经营范围
发明名称
SIMULATION OF ETCHING PROCESS
摘要
申请公布号
JPH02271525(A)
申请公布日期
1990.11.06
申请号
JP19890094013
申请日期
1989.04.12
申请人
NEC CORP
发明人
KATO HARUO
分类号
H01L21/302;H01L21/00;H01L21/306;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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