| 摘要 |
A cleanroom facility is provided with an air shower in which gasper jets are used to direct air in a preferred manner against persons entering the cleanroom facility. The gasper jets are combined with a downward air flow and with air curtains which limit the escape of dust particles from the air shower to remaining portions of the cleanroom facility. Primary and secondary air showers are provided to first remove excess particles from the person's street clothes, and then remove any loose particles which may be on the person's cleanroom clothing. A third air shower is provided as a separate secondary air shower for a second cleanroom facility area.
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