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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02267952(A)
申请公布日期
1990.11.01
申请号
JP19890089006
申请日期
1989.04.08
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
H01L21/76;H01L27/12;H01L29/78
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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