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发明名称
VORRICHTUNG ZUM ANBRINGEN EINER MONOMOLEKULAREN SCHICHT.
摘要
申请公布号
DE3765144(D1)
申请公布日期
1990.10.31
申请号
DE19873765144
申请日期
1987.03.19
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
ONO, YOSHINOBU, TOKYO, 146, JP
分类号
B05C3/02;B05C3/109;B05D1/20;G03F7/16;(IPC1-7):B05C3/02
主分类号
B05C3/02
代理机构
代理人
主权项
地址
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