| 摘要 |
<p>The apparatus comprises the combination of a gas laser oscillator equipped with a cooling mechanism for forcibly cooling a laser gas by a blower and a cooler with a computerised numeric controller (CNC). The NC laser apparatus consists of gas temperature measurement device (15) for measuring the inlet gas temperature of the blower, casing temperature measurement device (16) for measuring a casing temperature of the blower and an abnormality detects (24). When the inlet gas temperature or the casing temperature exceeds a predetermined reference value, the abnormality detector regards it as abnormality of the cooling mechanism and stops the operation of the laser oscillator. Accordingly, abnormality of the cooling mechanism is detected at an early state and secondary breakage of the blower (10) is be prevented.</p> |
