| 摘要 |
PURPOSE:To make it possible to convert a superconductor layer or a normal conductor layer into an insulating film, whose uniformity of thickness is excellent, or to convert the entire layer into an insulating layer, by using the second layer, which has conductivity when the first layer is converted into an insulator and has high resistance property or insulating property when a superconducting circuit is operated, and supplying a current to the first layer. CONSTITUTION:An auxiliary electrode layer 2 is arranged in contact with a substrate 1, which is coated by an insulating layer having electric insulating property. A part of a superconductor layer 3, which is formed on the layer 2, is converted into an insulating film by using, e.g., an anodic oxidation method and the like. At the time of the anodic oxidation, an electrolytic current is supplied to the superconductor layer 3 through the auxiliary electrode layer 2. Therefore, uniformity of the electrolytic current is improved throughout the superconducting circuit device. An insulating layer 4 having no dispersion in film thickness is obtained. A sufficient current is supplied to the thin region of the superconductor layer 3, which is not oxidized, and to the superconductor region, whose all periphery is converted into the oxidized film 4, through the auxiliary electrode layer 2. Then the entire superconductor layer 3 in the required region can be converted into the insulating layer 4. |
