| 摘要 |
PURPOSE:To shorten recognizing time of the position and quality of a semiconductor pellet by a method wherein signal informations obtained by scanning with an optoelectric transducer one or plural rows and columns of the two dimensional region on which the pellet is arranged and the previously stored reference values are compared to decide the position and quality of the pellet. CONSTITUTION:Bit check of the central row 12 of the two dimensional region 11 on which the pellet image 10 is mirrored is performed with the optoelectric transducer. The number of bits ''0'' is counted from the right to the left of the central row 12 up to time when a bit ''1'' appears. Then the number of bits ''0'' is counted from the left to the right to calculate the difference PX thereof. The difference PY is calculated the same in relation to the central column 13, and decision of size, decision of inferiority of the pellet image 10 are performed using counted data of the PX, PY and previously stored size and test condition of the pellet. Accordingly recognition treatment time of the pellet image is shortened. |
