发明名称 SEMICONDUCTOR DEVICE AND THE MANUFACTURING METHOD
摘要 A semiconductor device has a semiconducting substrate covered with a first insulating film having holes through which an interconnecting film can contact the substrate. An encapsulting layer, comprising an oxide of the interconnecting material, has a void overlapping the first penetrating hole. A second insulating film is applied to the encapsulating and overlaps the first and second penetrating holes. A second interconnecting film, selectively applied, links to the first interconnecting layer via the second penetrating hole. The first interconnecting film has a hillock of predetermined height formed at the first penetrating hole.
申请公布号 KR900007757(B1) 申请公布日期 1990.10.19
申请号 KR19860010041 申请日期 1986.11.27
申请人 MITSUBISHI ELECTRIC CO. LTD. 发明人 MOCHISKI HIROSI;IKEKAMI MASAAKI;SAITO GENGJI;DAMAKI ARIMA;DANAKA EISEUKE
分类号 H01L23/522;H01L21/28;H01L21/316;H01L21/768;(IPC1-7):H01L29/46 主分类号 H01L23/522
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