发明名称 |
SEMICONDUCTOR DEVICE AND THE MANUFACTURING METHOD |
摘要 |
A semiconductor device has a semiconducting substrate covered with a first insulating film having holes through which an interconnecting film can contact the substrate. An encapsulting layer, comprising an oxide of the interconnecting material, has a void overlapping the first penetrating hole. A second insulating film is applied to the encapsulating and overlaps the first and second penetrating holes. A second interconnecting film, selectively applied, links to the first interconnecting layer via the second penetrating hole. The first interconnecting film has a hillock of predetermined height formed at the first penetrating hole.
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申请公布号 |
KR900007757(B1) |
申请公布日期 |
1990.10.19 |
申请号 |
KR19860010041 |
申请日期 |
1986.11.27 |
申请人 |
MITSUBISHI ELECTRIC CO. LTD. |
发明人 |
MOCHISKI HIROSI;IKEKAMI MASAAKI;SAITO GENGJI;DAMAKI ARIMA;DANAKA EISEUKE |
分类号 |
H01L23/522;H01L21/28;H01L21/316;H01L21/768;(IPC1-7):H01L29/46 |
主分类号 |
H01L23/522 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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