摘要 |
<p>The present invention reduces the resonance amplitude of the rotational frequency-synchronous unbalance vibration of a rotor supported by an electromagnetic bearing. To this end, the invention disposes an X-direction control servo circuit and a Y-direction control servo circuit each of which detects the deviation of the rotor from a desired position in the radial direction thereof and controls the rotor so as to be held at the desired position on the basis of the detection signal, and a tracking filter which is synchronous with the rotational frequency. Outputs from the filter are crossed to supply the Y-direction control servo circuit with the X-directional output and to supply the X-direction control servo circuit with the Y-directional output signal.</p> |