发明名称 ELASTIC SURFACE WAVE APPARATUS
摘要 PURPOSE:To obtain a thin buffer material having a uniform thickness by coating an interdigital electrode forming surface with specific rubber. CONSTITUTION:An interdigital electrode 3 is provided on one surface of a thin piece-shaped piezoelectric substrate 2 composed of an org. polymer piezoelectric material and the surface provided with the electrode 3 of said substrate 2 is coated with RTV silicone rubber 6 as a buffering material to form an elastic surface wave apparatus 1. This RTV silicone rubber can be applied by dripping and the thickness of the buffer material can be uniformly reduced and the pressure at the time of the bonding of the apparatus 1 to a sample to be measured is made uniform to make it possible to well measure an elastic surface wave.
申请公布号 JPH02236161(A) 申请公布日期 1990.09.19
申请号 JP19890057520 申请日期 1989.03.09
申请人 FUJI ELECTRIC CO LTD 发明人 TOKIOKA MASAKI
分类号 G01D21/00;G01N29/00;G01N29/24;G01N29/28;H03H9/145;H04R17/00 主分类号 G01D21/00
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