摘要 |
PURPOSE:To obtain a thin buffer material having a uniform thickness by coating an interdigital electrode forming surface with specific rubber. CONSTITUTION:An interdigital electrode 3 is provided on one surface of a thin piece-shaped piezoelectric substrate 2 composed of an org. polymer piezoelectric material and the surface provided with the electrode 3 of said substrate 2 is coated with RTV silicone rubber 6 as a buffering material to form an elastic surface wave apparatus 1. This RTV silicone rubber can be applied by dripping and the thickness of the buffer material can be uniformly reduced and the pressure at the time of the bonding of the apparatus 1 to a sample to be measured is made uniform to make it possible to well measure an elastic surface wave. |