| 摘要 |
PURPOSE:To reduce the processing time of a process selectively eliminating an electrode leading-out end surface side part of dielectric by applying electric power in the manner in which the applying intensity of high frequency electric power being a plasma generating energy source is divided into two stages. CONSTITUTION:In a process wherein an electrode leading-out end surface side part of a PPS film 1a is selectively eliminated, the output of a high frequency power supply 2 being an oxygen plasma generating energy source is applied as follows; 700W for 15 minutes in a first stage, and 500W for 20 minutes in a second stage. By the application of high frequency electric power of 700W in the first stage, a lot of reactive components with the PPS film 1a is formed, and accelerates the elimination speed of the PPS film 1a. As the result, the temperature of a film capacitor element body 2 is raised in a short time up to 270 deg.C being approximate to the heat-resistant temperature. By the application of high frequency electric power of 500W in the second stage, the process is progressed while the temperature is kept constant at 270 deg.C without increasing the temperature of the film capacitor element 1a higher than or equal to 285 deg.C being the heat-resistant temperature. Thereby, the processing time can be reduced. |
