PLASMA TREATMENT DEVICE,申请号JP19890019789-传众专利搜索

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发明名称	PLASMA TREATMENT DEVICE
摘要
申请公布号	JPH02201923(A)	申请公布日期	1990.08.10
申请号	JP19890019789	申请日期	1989.01.31
申请人	CANON INC	发明人	SATO YASUE
分类号	C23C14/34;C23C14/35;C23C16/50;C23C16/511;C23F4/00;H01L21/302;H01L21/3065;H01L21/31	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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