| 发明名称 |
PROCESS ON PHOTOETCHING OF SUPERFICIAL COATINGS BASED ON POLYMERIC MATERIALS |
| 摘要 |
<p>Process of photoetching of superficial coatings based on polymeric material comprising the irradiation of the coated surface with localized excimer laser beams having wavelengths equal to or lower than 193 nm.</p> |
| 申请公布号 |
CA1272377(A) |
申请公布日期 |
1990.08.07 |
| 申请号 |
CA19870540774 |
申请日期 |
1987.06.29 |
| 申请人 |
MONTEDISON S.P.A. |
发明人 |
GARBASSI, FABIO;OCCHIELLO, ERNESTO;MALATESTA, VICENZO |
| 分类号 |
H01L21/027;G03F7/20;H05K3/00;(IPC1-7):B23K26/00 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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