EVALUATION DEVICE FOR SEMICONDUCTOR SUBSTRATE,申请号JP19890005169-传众专利搜索

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发明名称	EVALUATION DEVICE FOR SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH02184742(A)	申请公布日期	1990.07.19
申请号	JP19890005169	申请日期	1989.01.11
申请人	NEC CORP	发明人	YANO HITOSHI
分类号	G01R31/00;G01N21/45;H01L21/66	主分类号	G01R31/00
代理机构		代理人
主权项
地址

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