| 摘要 |
The device includes a spinning head rotatable at a specified rate, and a member for dispensing a liquid onto a workpiece held on the head. A supersonic vibration transducer is embedded in the head, and conductors feed supersonic power generated by a generator to the transducer. Thus, supersonic vibration can be applied to a liquid dispensed onto the workpiece. The transducer is pref. embedded in an insulating material disc of the spinning head. The liquid is pref. a photoresist material.
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