| 摘要 |
PURPOSE: To obtain a radiation sensitive system by adding a specifiedβ-ketoacid ester as a compd. to inhibit a binder from dissolving in an alkali soln. CONSTITUTION: This mixture consists of a binder or a binder mixture which is insoluble with water but soluble with an alkali soln., a compd. which produces strong acid by irradiation, and an org. compd. which inhibits dissolution of the hinder or the hinder mixture in an alkali soln. The org. compd. is aβ- ketoacid ester expressed by formula I. In formula I, R<1> is an alkyl, cycloalkyl, aralkyl group or oxygen-contg. heteroring residue, R<2> and R<3> are hydrogen, halogens, alkyl, cycloalkyl, aralkyl groups, etc., and R<1> and R<2> or R<3> and R<4> may form a ring with -(CH2 )n , wherein (n) is 2 to 5. R<4> is an alkyl, cycloalkyl, aryl group or -CH2 -CO-OR<1> . Thereby, a system having sensitivity with radiation can be obtd. and the reproducibility and resolution can be improved. |
