| 摘要 |
<p>PURPOSE:To obtain a sliding member having excellent abrasion resistance and lubricity and stable over a long period by applying a hard carbon film containing an amorphous material and a micro-crystalline material containing C and H as main structure-forming elements. CONSTITUTION:The objective sliding member is produced by applying a hard carbon film containing an amorphous material and/or a micro-crystalline material containing C and H as main structure-forming elements (e.g. diamond-like carbon film, i-C film, amorphous diamond film and thin diamond film) by ion beam process, plasma CVD process, etc. The member is used as a sliding face, sliding part, slide-contacting part, etc., of a bearing, shaft, etc., of audio set, VTR, video disk, hard disk, computer, etc.</p> |
