REDUCED PRESSURE VAPOR PHASE GROWTH DEVICE,申请号JP19880314106-传众专利搜索

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发明名称	REDUCED PRESSURE VAPOR PHASE GROWTH DEVICE
摘要
申请公布号	JPH02159018(A)	申请公布日期	1990.06.19
申请号	JP19880314106	申请日期	1988.12.12
申请人	NEC CORP	发明人	SHIBUYA YASUO
分类号	C23C16/44;H01L21/205;H01L21/31	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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