| 摘要 |
PURPOSE:To project monochroic X-rays by a method wherein contraction or expansion mirrors in the X and Y directions made of symmetrically cut single crystal bodies are used while respective mirrors are selectively set up at specified Bragg angles. CONSTITUTION:Radiant light 12 from an X-ray source 11 such as synchrotron is firstly made monochroic in specific wavelength by a monochromator 13 before passing through an exposure mask 14 and after successively passing through an X-direction contracting mirror 15 and a Y-direction contracting mirror 16 respectively made of symmetrically cut single crystal bodies so that the pattern of an exposure mask 14 may be contraction-projected on an exposed substrate 17 coated with a resist film. |
