发明名称 Self-aligned nonnested sloped via
摘要 A via (64, 66, 68) comprises a conductor (45, 46, 48) having a first surface (58, 60, 62) and at least one second surface (49) that forms at least one edge (52) with the first surface (58, 60, 62). A first insulator layer (33) is formed on the first surface and defines a first area (58, 60, 62) on the conductor that is not covered by the first insulator layer (33). A second insulator layer (70) is formed over the second surface (49). The first and second insulator layers (33, 70) define a via (64, 66 and 68) to the conductor (45, 46, 48). The bottom area (58, 60, 62) of the via (64, 66, 68) is equal to the first area and is bounded in part by the edge (52).
申请公布号 US4931144(A) 申请公布日期 1990.06.05
申请号 US19890349020 申请日期 1989.05.08
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 BRIGHTON, JEFFREY E.
分类号 H01L21/768 主分类号 H01L21/768
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