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发明名称
摘要
申请公布号
JPH0272996(U)
申请公布日期
1990.06.04
申请号
JP19880152362U
申请日期
1988.11.22
申请人
发明人
分类号
G12B5/00;G03F1/00;G03F7/20;G03F9/00;H01L21/027;H01L21/30;H01L21/68;H01L21/683
主分类号
G12B5/00
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代理人
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地址
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