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发明名称
ALIGNMENT
摘要
申请公布号
JPH02137347(A)
申请公布日期
1990.05.25
申请号
JP19880291718
申请日期
1988.11.18
申请人
TOKYO ELECTRON LTD
发明人
KARASAWA WATARU
分类号
G01R31/28;G01R31/00;H01L21/66
主分类号
G01R31/28
代理机构
代理人
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地址
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