| 摘要 |
<p>PURPOSE:To enlarge a non-linear coefficient (alpha) in a high current region while lowering limit voltage by introducing gas containing at least one kind or more of N2, H2, CO, CO2 and Ar in a specific temperature section during heating baking under 1% of oxygen concentration. CONSTITUTION:Gas having oxygen concentration under 1% and containing at least one kind or more of N2, H2, CO, CO2 or Ar by holding a gas atmosphere during baking at least in a fixed section above 800 deg.C is introduced. Here, H2 and OR purpose to have a reducing atmosphere, N2 and Ar purpose to have a neutral (inert) atmosphere, and CO2 purpose to have a weak oxidation atmosphere. Further, (alpha) is remarkably improved in a high current region when oxygen concentration is under 1% or 0%. Thereby, (alpha) in the high current region can be enlarged while securing (alpha) in a low current region, and as a result limit voltage can be suppressed low so that parts excellent in surge strength can be obtained.</p> |
