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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
EP0106623(B1)
申请公布日期
1990.05.23
申请号
EP19830306022
申请日期
1983.10.05
申请人
FUJITSU LIMITED
发明人
NAGASHIMA, SETSUO
分类号
C23C14/34;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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