| 摘要 |
<p>PURPOSE:To make it possible to utilize effectively a cassette dam and to make small the size of the title handler by a method wherein the handler is provided with a means, which can make an empty rack in the cassette dam correspond arbitrarily to one, which is specified by input, of the tubes of a diffusion furnace. CONSTITUTION:A handler is provided with a cassette dam 4 for housing cassettes housing semiconductor waters 1, a transfer 10 for trensferring the wafers 1 between a taken-out cassette 2 and a boat 11, a diffusion furnace 16 for heat-treating the wafers 1, a boat loader station 14 for inserting or drawing out the boat 11 holding the wafers 1 in or from the furnace 16, a liner 12 for transferring the boat 11 between the transfer 10 and the station 14 and a control device 21 for executing a series of this operation according to the request for treatment of the furnace 16. Moreover, the handler is provided with a cassette empty rack r retrieving means for making an empty rack in the dam 4 correspond arbitrarily to tubes 16a to 16d of the furnace 16.</p> |
