发明名称 WIRE-BONDING METHOD AND APPARATUS THEREFOR
摘要 PURPOSE:To improve detection accuracy by inspecting the disconnection of a wire on the side of a pad by passing microcurrent through the wire just before the wire is connected to a terminal on the side of a lead frame. CONSTITUTION:After a wire 5 is connected to a pad 3 on a semiconductor chip 2, and just before the same is connected to a terminal 4 on the side of a lead frame 1, microcurrent is passed through the wire 5 to detect any disconnection of the wire 5 from the pad 3. That is, once such microcurrent is passed through the semiconductor chip 2 via the wire 5 just before the wire 5 is bonded to the terminal 4 on the side of the lead frame 1, voltage of the wire 5 is raised provided there is existent any wire disconnection. Hereby, wire disconnection can securely be detected.
申请公布号 JPH0296344(A) 申请公布日期 1990.04.09
申请号 JP19880248215 申请日期 1988.09.30
申请人 MATSUSHITA ELECTRON CORP 发明人 SHINYA TERUO
分类号 H01L21/60 主分类号 H01L21/60
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