PLASMA ASHING DEVICE,申请号JP19880245055-传众专利搜索

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发明名称	PLASMA ASHING DEVICE
摘要
申请公布号	JPH0290612(A)	申请公布日期	1990.03.30
申请号	JP19880245055	申请日期	1988.09.28
申请人	NEC CORP	发明人	INAGAKI NAOKI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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