| 摘要 |
<p>PURPOSE:To obtain uniform film thickness by atomizing a sensitized material to a substrate at the time of manufacturing a color filter. CONSTITUTION:A sensitized material 2 is applied to a glass substrate which is cleaned. At the time of applying the sensitized material 2, the sensitized material 2 is supplied to a spray nozzle 1 by a pump 3, and also, air whose flow velocity is made constant by a regulator 4 is supplied so that the sensitized material is atomized. In such a case, it is desirable that the glass substrate is rotated so that the atomized sensitized material 2 is applied uniformly. In such a way, a variance of sensitized material film thickness caused at the time of spin application is not generated, and also, even at the time of applying the sensitized material of a second color and a third color, a uniform film can be obtained without being influenced by a pattern of a previous color.</p> |
