| 摘要 |
<p>PURPOSE:To uniformly form many nonlinear elements with decreased defects over a wide region by providing island-shaped protective parts consisting of a 1st conductor near the nonlinear elements constituted by laminating a 1st dielectric material, an insulator and a 2nd conductor on a substrate. CONSTITUTION:The nonlinear elements are formed of MIM elements each constituted by consisting the 1st dielectric material of Ta, the insulator of TaOx and the 2nd conductor of Cr. The protective parts 4 are formed of Ta near the parts forming the nonlinear elements of the Ta 1 (the part hatched with oblique lines downgrading leftward), independently from the Ta forming the MIM elements. Since the Ta is commonly used for the protective parts 4 and the MIM elements, the misregistration between the MIM elements and the protective parts by misalignment is obviated. The protective parts 4 exist near the MIM element parts of the Ta even if the MIM elements exist in any part of the substrate and, therefore, the etching rate is uniformly lowered and the uniformity is improved.</p> |
