发明名称 |
MULTILAYER CERAMICS COATINGS FROM THE CERAMIFICATION OF HYDROGEN SILSESQUIOXANE RESIN IN THE PRESENCE OF AMMONIA |
摘要 |
<p>Hydrogen silsesquioxane resin can be ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a ceramic coating on the surface of a substrate. The nitrided silica coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided silica with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.</p> |
申请公布号 |
EP0323103(A3) |
申请公布日期 |
1990.03.21 |
申请号 |
EP19880312027 |
申请日期 |
1988.12.19 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
HALUSKA, LOREN ANDREW;MICHAEL, KEITH WINTON;TARHAY, LEO |
分类号 |
C04B41/87;H01L21/314;H01L23/532;H05K3/28;(IPC1-7):H01L21/312;H01L21/324;H01L21/318;C04B41/52 |
主分类号 |
C04B41/87 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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