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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0268952(A)
申请公布日期
1990.03.08
申请号
JP19880220222
申请日期
1988.09.02
申请人
TOSHIBA CORP
发明人
KAGAMI SHOICHI
分类号
H01L23/522;H01L21/28;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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