| 摘要 |
PURPOSE:To prepare a highly accurate head by simple constitution by forming the end part, to which an opening must be formed, of at least one of a heat energy acting substrate and a grooved substrate by a method employing no mechanical removing processing. CONSTITUTION:A liquid jet recording head consists of a heating unit substrate (heat energy acting substrate) 11 and a flow passage substrate (grooved substrate) 12 and a heat energy acting part (e.g., a heating unit or a discharge electrode) 14 is arranged in a flow passage 13 to form an emitting orifice 15. The end surface 16 on the emitting orifice side of at least one of the grooved substrate 12 and the heat energy acting substrate 11 is formed by a method employing no mechanical removing processing. For example, said end surface is formed by a plastic molding method, the etching of photosensitive glass or the anisotropic etching of single crystal Si. The heat energy acting substrate 11 and the grooved substrate 12 are not bonded by an adhesive, thermal deformation or the diffusion of mutual materials but arranged opposedly by pressing force F. By this method, the deformation and clogging of an emitting orifice part are eliminated and a highly accurate emitting orifice can be obtained. |
