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发明名称
FORMATION OF GATE ELECTRODE
摘要
申请公布号
JPH0263129(A)
申请公布日期
1990.03.02
申请号
JP19880214245
申请日期
1988.08.29
申请人
SUMITOMO ELECTRIC IND LTD
发明人
NAKAJIMA SHIGERU
分类号
H01L21/3205;H01L21/288;H01L21/338;H01L29/812
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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