发明名称 TENSION CONTROL METHOD AND DEVICE
摘要 PURPOSE:To also remove abrasion resistance between an extra fine wire and a device without giving winding peculiarity to the extra fine wire so as to enable precise wiring of the extra fine wire by drawing the linear extra fine wire in the opposite direction to the veering-out direction through a spring. CONSTITUTION:The catching device 2 of a tension controller nips an extra fine wire 1 between a movable arm 12 and a fixed arm 13, and it catches the extra fine wire 1 by pressing the movable arm 12 against the fixed arm 13 by the air pressure. The catching device 2 is mounted to a traction device 4 through plate springs 3, and it constitutes a link mechanism by the two plate springs 3 installed from the front and the rear. By the restoring force of this plate spring 3, the extra fine wire 1 is given tension. The traction device 4 can move along a guide of a travelling rail 6 extended in the same direction as the veering-out direction of the extra fine wire 1 by a built-in motor 5, and by controlling the position of the traction device 4 by means of the motor 5, it is adjusted so that the displacement of the plate spring 3 may be proper displacement for generating the set tension.
申请公布号 JPH0247842(A) 申请公布日期 1990.02.16
申请号 JP19880197914 申请日期 1988.08.10
申请人 HITACHI LTD 发明人 TAMAOKI KENJI
分类号 H01L21/60 主分类号 H01L21/60
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