| 摘要 |
PURPOSE:To prevent the blackening of a multilayer ceramic substrate, a decrease in insulation resistance value, blister, oxidation of a copper conductor, etc., by burning a work in which a copper conductor is formed on a green sheet and laminated in a multilayer structure in a mixture gas atmosphere of water vapor, oxygen and inert gas at temperatures below 1000 deg.C. CONSTITUTION:Feedstock powder of ceramics, organic binder and so forth are mixed to form a green sheet. A wiring conductor is formed thereon. After the green sheet is laminated in a multilayer structure, it is burned in a mixture gas atmosphere of water vapor, oxygen and inert gas at a temperatures below 1000 deg.C. That is, during burning, it is varied at the steam partial pressure and the oxygen partial pressure at which it is mixed in inert gas in separate ranges of about 550 deg.C or less and about 650 deg.C or more so that organic binder in the green sheet is scattered completely. This makes it possible to prevent the blackening of a substrate, a decrease in insulation resistance value, and blister. |
