发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent characteristic deterioration called channel leakage by fluctuation of the threshold value voltage by a method wherein a MOS field effect transistor includes a gate region having a plurality of threshold value voltages and thereby the threshold value voltage of a channel region liable to receive stress is in advance adjusted and changed. CONSTITUTION:A MOS field effect transistor includes a gate region having a plurality of threshold value voltages shown by A and B. For instance, suppose that great stress is put on the region A. In this case, the threshold value voltage lowers caused by increased interface charge or the like the MOS field effect transistor. In this case, however, when the p-type substrate impurity density in this region A is if advance raised higher than the region B (possible by an ordinary channel doping method or the like) to raise the threshold value voltage, the portion of the lowered threshold value voltage due to stress can be compensated for.
申请公布号 JPH0214575(A) 申请公布日期 1990.01.18
申请号 JP19880165632 申请日期 1988.06.30
申请人 MITSUBISHI ELECTRIC CORP 发明人 MIYATA KAZUAKI;MORITA ISAO
分类号 H01L29/78 主分类号 H01L29/78
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