发明名称 PHOTODETECTING DEVICE, PHOTODETECTOR, AND STEM
摘要 PURPOSE:To obtain a photodetecting device equipped with a photodetector which holds a fixing position with high accuracy with respect to a stem by providing marks for detecting positions at the side of a light receiving plane of the photodetector and at the side of a principal plane of the stem. CONSTITUTION:A photodetecting device 19 is composed of: a stem 4; a photodetector 1 which is fixed to the principal plane of the stem 4 directly or indirectly; a cap 21 having a transparent window 32 which is mounted so as to cover the photodetector 1 at the principal plane of the stem 4. Then, marks 18 and 26 for detecting positions are provided at the side of a light receiving plane of the photodetector 1 and at the side of its principal plane of the stem 4. For example, the marks 18 for detecting the positions of respective short projection lines which are prepared on a protecting film at each corner part of the principal plane of the photodetector 1 are attached on diagonal lines at four corners of a square and further, the marks 26 for detecting the positions are provided in such a way that they are spaced at 90deg. on the circumference of a circle round a center of the stem 4 at the surface of the principal plane of the stem 4, that is, a circular pedestal part 23 so as to correspond to the marks 18.
申请公布号 JPH022645(A) 申请公布日期 1990.01.08
申请号 JP19880149326 申请日期 1988.06.17
申请人 HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD 发明人 TSUCHIYA MASAAKI;KAWABATA TSUNETOSHI
分类号 H01L21/52;H01L31/02 主分类号 H01L21/52
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