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发明名称
PRODUCTION OF METAL MEMBRANE BY VAPOR DEPOSITION
摘要
申请公布号
JPH01316451(A)
申请公布日期
1989.12.21
申请号
JP19890090521
申请日期
1989.04.10
申请人
SIEMENS AG
发明人
YOOZEFU UIRAA
分类号
C23C14/14;C23C14/24;C23C14/54
主分类号
C23C14/14
代理机构
代理人
主权项
地址
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