SPUTTERING DEVICE,申请号JP19880141085-传众专利搜索

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发明名称	SPUTTERING DEVICE
摘要
申请公布号	JPH01309963(A)	申请公布日期	1989.12.14
申请号	JP19880141085	申请日期	1988.06.08
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	TANAKA KUNIO;YOKOYAMA MASAHIDE
分类号	C23C14/34;C23C14/08;C23C14/35;H01L21/285	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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