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发明名称
SOFT MAGNETIC THIN-FILM
摘要
申请公布号
JPH01309307(A)
申请公布日期
1989.12.13
申请号
JP19880110603
申请日期
1988.05.09
申请人
ULVAC CORP
发明人
NAKAMURA KYUZO;OTA YOSHIFUMI;ISHIKAWA MICHIO;TANI NORIAKI;HASHIMOTO YUKINORI
分类号
C23C14/06;C22C38/00;H01F10/14
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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