| 摘要 |
<p>PURPOSE:To facilitate carrying-in of cassettes according to the throughput capacity of each manufacturing line by a method wherein the conveying destination of each cassette is decided according to the operating condition of treating devices and the unoperating condition of buffers. CONSTITUTION:A computer to control transfer calculates and stores the number of treating devices under an unoperating condition and the number of buffers under an unoperating condition in each manufacturing line in every manufacturing line and calculates and stores the number of cassettes, whose transfer destination lines are already decided. Moreover, the transfer destination line of each cassette is decided in the order of a manufacturing line having treating devices under an unoperating condition even after transfer of all the cassettes ends, a manufacturing line having unoperating ones among buffers before a device treatment and a manufacturing line having unoperating ones among buffers before a line treatment from among the manufacturing lines, which can be set according to the operated results conducted using each numerical value being stored and the progress of a process. Thereby, even in case a throughput capacity is different according to manufacturing lines, the balance of the number of the cassettes before a treatment of each manufacturing line is maintained.</p> |
