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发明名称
METHOD OF DUPLICATING DIFFRACTION GRATING
摘要
申请公布号
JPH01303406(A)
申请公布日期
1989.12.07
申请号
JP19880132746
申请日期
1988.06.01
申请人
HITACHI LTD
发明人
AKITOMO NOBUO;MAYAMA SHINJI
分类号
G02B5/18
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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